U.S.-funded aid programs around the world were firing staff and shutting down or preparing to stop operations, as the Trump administration’s unprecedented freeze on almost all foreign assistance brought their work to a sudden halt.

Secretary of State Marco Rubio, who initially exempted only emergency food programs and military aid to Israel and Egypt from the aid pause, agreed Tuesday to at least temporarily keep spending money on humanitarian programs that provide life-saving medicine, medical services, food, shelter and subsistence assistance, according to a copy of a signed waiver obtained by The Associated Press. While some in the aid community expressed hope Rubio’s move would rescue more of the programs that keep alive refugees, the gravely ill and others around the world, U.S.-funded operations of all kinds stepped up the pace of layoffs, furloughs and program shutdowns.

President Donald Trump ordered the 90-day freeze last week to give the administration time to review which of the thousands of humanitarian, development and security programs will keep getting money from the U.S.